The Copper Damascene Process & Chemical Mechanical Polishing (CMP) in Advanced 3D IC Chips ......
3:58
YouTubeQuantum & Electron Devices, Circuits & Systems
The Copper Damascene Process & Chemical Mechanical Polishing (CMP) in Advanced 3D IC Chips ......
The Copper Damascene Process & Chemical Mechanical Polishing (CMP) in Advanced 3D IC Chips By Dr. Imran Khan The process sequence used by the semiconductor industry to fabricate Cu interconnects is called the “dual-damascene” process. In this process, nanoscale features including vias and trenches are first etched in a dielectric layer ...
7.3K viewsJun 26, 2020
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